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Complete 100mm/4" Probe station kit, wide platen bars, 2 large manipulators, holders and tips, compound scope, fiber optic illumination |
Auction ID :
101313 |
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| Description |
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Probe Station kit with wide platen bars for use with 100 mm / 4" wafers, complete with compound microscope and fiber optic illumination, 5X and 20X LWD objectives, 1 pair of largee micropositioners with 1 µm resolution, probe holders, and 1 box of probe tips.
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Product Description:
This Probe Station is intended for academic research in a university lab. It will be equally well suited for any situation with space and/or budget constraints. While small it still offers most of the capabilities of larger units.
Extra wide platen bars allow to use larger positioners when 1 µm accuracy is needed.
Or you could use positioners with vacuum base, the wider bars give you more room to move them around. Also, this will allow you to use heavy RF probe arms that need bigger positioners for attachment.
Optional: 2 platen bars in front and back for 4-quadrant probing.
This kit is intended for probing situations where accuracy in the 1 µm range is needed, for example for work on high density dies. The alternative would be a larger probe station with Mitutoyo Finescope or Motic PSM-1000 at very significantly increased cost.
For standard 4" (100 mm) wafer testing a stereo zoom scope and 10 µm positioners are normally sufficient and result in significantly lower cost.
Also, you might consider using this scope and associated accessories on other jobs, too. A Pole stand without Focus block is only $80 and then you have a high quality stand-alone Compound Scope as well. Setting up is a couple of minutes at the most.
Features:
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Close-up view of chuck area, showing X-Y and theta adjustments. (standard platen bars shown) |
Specifications:
- 4" stainless steel vacuum chuck
- Chuck stage allows 3" x 3" travel in X-Y directions
- Chuck theta is adjustable by 30 degrees
- Platen allows placement of up to 5 large manipulators, or 4 more if using optional platen bars for other quadrants
- Footprint: 320 x 320 mm (12.6" x 12.6")
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Height without scope: between 280 and 460 mm or 11"to 18"
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Height with scope installed 485 mm or 19"
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Net weight of base: 22 kg or 49 lbs
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1 year manufacturer warranty
Compound microscope:
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Focus block with coarse and fine adjustment
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Trinocular erect image head with depolarizer
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Quintuple nosepiece for objectives with 26 mm Mitutoyo thread
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10X eyepieces
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Plan APO 5x NA=0.13 WD=44.5 mm Metallurgical objective
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Plan APO 20x NA=0.29 WD=31 mm Metallurgical objective
- 50X or 200X total magnification, 500X, 1000X or higher with optional objectives and/or eyepieces
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Fiber optic light source and 915 mm (36") flexible light guide
Options:
50X objectives from same manufacturer are readily available, resulting in 500X total magnification or 1000X when using 20X eyepieces.
Alternatively a wide range of Mitutoyo objectives can be used. Mitutoyo's SL line includes 100X and - for selected applications - 200X objectives.
Motic LWD objectives can be used as well. DIN objectives (Infinity) will work with readily available adapters.
Operational Requirements:
- 110 VAC - 60 Hz (or 230V - 50Hz) main outlet
- 7 liter/min 250 mmHg vacuum supply
Available Accessories:
- Chuck Stage: Push to Position
- Chuck Stage: Vacuum assisted movement
- Microscope tilting mechanism +
- Quick right angle switchover
- Adapter for Light Intensity / Wave Length measurement
- RF Probes and Cables
- Active probes
- Laser Cutter
- Low current / capacitance probes
- High voltage probes
- Closed Circuit TV
- Photomicrographics
- Holder for Packaged Devices
- Holder for PCB boards
- Thermal systems
- Liquid Crystal Kit
- Vibration free table top
- Shielding box
- Test bench
- Instrument case with caster
- Chuck vacuum pattern
- Gold plated chuck
Please contact us (or phone 800-864-5391, 361-384-0754 from outside the US, supply your phone number and we will call you back) if you need help in selecting the right parts combination for your application.
Inserted images in picture below are not to scale.
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Shipping Information:
Station is quite heavy and shipping by UPS is cost efficient.
We will supply you with tracking information.
A printed invoice is either included with the shipment or will be mailed later. Please refer to the invoice number if you have a question or run into a problem with the item.
Accelerated shipping by air is available but will drive up cost a lot. Please contact us.
Payment Information:
Our shopping Cart supports Google Checkout, Moneybookers, credit cards, PayPal. You can combine multiple items into one shipment and payment. Please use the Special Instruction of our cart to tell us about your needs like accelerated shipping or other special considerations you might have. If needed we can send you a customized shipping proposal.
Preferred payment option is Google Checkout.
We accept PayPal from confirmed addresses only, no exceptions. Alternatively you can supply additional information to allow confirmation. Your shipping address needs to match the confirmed address.
 Card Billing Address needs to match shipping address. Or you will need to add an additional address to your card.
There will be 6.75% sales tax to all shipping addresses inside Texas.
Warranty:
This is a new part and comes with a 1-year manufacturers warranty.
In case you run into a problem contact us by email or phone 800-864-5391 or 361-384-0754 from outside the US.
Rate Group: 50/49.5
We ship internationally:
Preferred payment method for customers in Europe is Moneybookers:
Located in London, Moneybookers Ltd. is authorized by the FSA to issue electronic money as a specialized electronic money issuer. We will send you a non-binding payment request.
You can do an in-country bank transfer, free with many bank accounts.
Address confirmation is not an issue contrary to PayPal!
With this payment option we can ship by Priority Mail with insurance but no tracking.
Checks or Money Orders from outside the US need to have a US routing number. A clearing period applies to all checks and foreign money orders.
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Supported payment options are MC/Visa/DC/Amex, Google Checkout, Moneybookers, PayPal (inside US only) check, MO/CC, COD (max $300).
Shopping Cart support for 5 different locations:
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1. Texas, you will need to pay sales tax.
2. Lower Continental US
3. Alaska, Hawaii, Puerto Rico
4. Canada
5. Outside US and Canada |
Please use the drop down menu option matching your location. |
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Package Content:
1 x Probe Station base unit with microscope mount
1 x stage with chuck
2 x extra wide platen bars
Modified Meiji Techno based compound microscope consisting of
1 pair 10X eyepieces
Trinocular erect image head with depolarizer
Heavy duty focus block with fine adjustment
Quintuple nosepiece with Mitutoyo threading
5X ad 20X LWD objectives
2 x large ball bearing positioners with 1 µm accuracy
2 x plain screw type probe holders
Box of 10 tungsten probe tips | |
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| Shipping Conditions |
Buyer pays for shipping expenses |
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Seller ships internationally |
| Postage |
USD 45.40 |
| Insurance |
USD 63.60 |
| Shipping Method |
UPS ground |
| Shipping & Payment Details |
Heavy item, will be shipped by UPS.
Free shipping not available for probe stations.
International shipping can be by Express Mail in several packages. |
| The poster, ProbingSolution, assumes all responsibility for the contents of this listing |
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| Complete 100mm/4" Probe station kit, wide platen bars, 2 large manipulators, holders and tips, compound scope, fiber optic illumination |
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